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It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.
EUV lithography is important because it makes scaling more affordable for chipmakers and allows the semiconductor industry to continue its pursuit of Moore’s Law. EUV systems are used to print the most intricate layer...
3 days ago · Chinese semiconductor firms and policymakers are ramping up efforts to build domestic EUV lithography tools to challenge ASML Holding's monopoly. These efforts are widely viewed as a long term ...
EUV stands for "extreme ultraviolet" light. The light visible to humans has wavelengths between 400 and 800 nanometers. The range of ultraviolet light begins below 400 nanometers. The leading lithography process to da...
Nov 28, 2024 · Extreme ultraviolet (EUV) lithography is used to fabricate features with nanometre-scale resolution.
4 days ago · IBM and Lam Research expand partnership to develop High-NA EUV processes aimed at enabling sub-1-nm chips for future AI systems.
Nov 20, 2025 · Extreme Ultraviolet EUV and Deep Ultraviolet DUV light sit in one of the most important regions of the optical spectrum for semiconductor manufacturing, metrology, and advanced research.
Nov 6, 2025 · Extreme Ultraviolet (EUV) lithography is a specialized manufacturing process that has become the sole method for printing the smallest, most advanced microchips available today.
EUV lithography represents a departure from earlier photolithography approaches used by the semiconductor industry in several important respects, particularly the light source.
Sep 2, 2025 · EUV lithography is a cornerstone of modern semiconductor manufacturing, allowing the production of microchips that are smaller, faster, and more efficient than their predecessors.